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269 Atomic Layer Deposition of W:Al2O3 Nanocomposite Films with Tunable Resistivity

Original Uploaded File: Download W-Al2O3 - Mane - CVD 2013.pdf

Description:

Authors:
Jeffrey W. Elam
Anil U. Mane

Groups:
Characterization

Categories:
Published Papers

Uploaded By: PSEC author

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